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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper LThA1

Ultrashallow contact formation in low-power electronic circuits using patterned high-power XeCI lasers

Open Access Open Access

Abstract

Ultratech Stepper has built an advanced projection gas immersion laser doping tool and demonstrated ultrashallow contact formation using the newly developed equipment.

© 1998 Optical Society of America

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