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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper LThA2

In situ spectral ellipsometry for realtime diagnostics and control in microelectronics manufacturing

Open Access Open Access

Abstract

Real-time sensors capable of process and wafer state monitoring are key enablers in monitoring and control of microelectronic manufacturing processes.

© 1998 Optical Society of America

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