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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper LThA3

Application of optical scatterometry to microelectronics processing

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Abstract

Many technology areas require metrology techniques to characterize the physical dimensions and overall profile of small (sub-0.5 μm) structures.

© 1998 Optical Society of America

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