Lithography: lasers and optics, what else is there?

Karen H. Brown

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper LTuA1

Lithography: lasers and optics, what else is there?

Karen H. Brown

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

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Lithography: I (LTuA)

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K. H. Brown, "Lithography: lasers and optics, what else is there?," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper LTuA1.

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Abstract

The electronics industry is a key driver in the United States and world economics. In 1996 this industry accounted for $340 billion in the United States and over $800 billion in the global economy.

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