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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CMD2

Compensated shearing interferometry with spatially incoherent light sources

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Abstract

Shearing interferometry is a common-path interferometric technique, which uses two different regions of a surface for the reference and object.

© 1999 Optical Society of America

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