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Conferences > CLEO > 1999 > CMD > CMD3
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CMD3

Deconvolution of local surface response from surface topography in optical profilometry by a dual-scan method

Chao-Wei Tsai, Chau-Hwang Lee, and Jyhpyng Wang

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Abstract

In optical profilometry the measured raw data represent a convolution of local surface response to the probing light and surface topography.

© 1999 Optical Society of America

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