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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CME3

Zemike mode generation and dynamic focusing using a micromachined membrane deformable mirror

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Abstract

Multi-channel micromachined membrane deformable mirrors (MMDM) are recently developed devices with advantages of low-cost, compactness and up to a few hundred hertz bandwidth.

© 1999 Optical Society of America

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