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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CThK45

Design and application of an advanced laser spectrometer for industrial process monitoring

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Abstract

Vacuum deposition of metallic and metal oxide films is economically important in manufacturing products such as semiconductors, superconducting materials, optical component coatings, dielectric insulating coatings, and high-performance composite materials.

© 1999 Optical Society of America

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