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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CTuT2

Self-assembled micro-scanner fabricated by surface-micromachining technology

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Abstract

Optical scanners are used in a wide variety of applications such as printing, quality inspection, confocal microscopy, data storage, precision pattern generation, display, and medical imaging.

© 1999 Optical Society of America

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