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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CFD5

Precision micro-machining with nanosecond lasers

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Abstract

Visible and ultraviolet lasers with pulse durations of a few nanoseconds have demonstrated an ability to machine a wide variety of materials with micron precision and submicronsized heat affected zones and recast layers.

© 2000 Optical Society of America

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