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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CFK3

Threshold and morphology of femtosecond laser-Induced damage in silicon

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Abstract

Micromachining with femtosecond laser systems has evolved since these lasers have been readily available for a wide set of parameters.

© 2000 Optical Society of America

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