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Conferences > CLEO > 2000 > CMX > CMX4
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CMX4

Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps

K. Kurosawa, H. Yanagida, N. Takezoe, Takezoe, Y. Kawasaki, G. Fujita, J. Miyano, and A. Yokotani

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Abstract

Excimers are the most promising active media for light sources whose wavelength lays in vacuum ultraviolet (VUV) spectral region, but it is very difficult to realize the laser oscillation.

© 2000 Optical Society of America

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