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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CThL3

Surface-micromachined confocal scanning optical microscope

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Abstract

The confocal scanning microscope (CSM) can create high-resolution three-dimensional (3D) images of thick and light-scattering objects from successive acquisition of 2D images through its optical sectioning property.

© 2000 Optical Society of America

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