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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CTuA26

157 nm anti-Stokes Raman laser pumped with the fifth-harmonics of the Nd:YAG laser

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Abstract

Vacuum ultraviolet light sources based on solid state lasers are attractive for numerous applications such as materials processing, semiconductor processes, semiconductor inspection, and soon.

© 2000 Optical Society of America

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