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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CFC3

Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses

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Abstract

Previous work in our group has shown that novel conical microstructures are formed on the surface of silicon when it is irradiated with 100-fs laser pulses in the presence of halogen-containing gases (see Fig. 1). Structures are also formed using other background gases, such as N2 or air, but they tend to be more blunt and irregular in shape.1,2

© 2001 Optical Society of America

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