Abstract
Previous work in our group has shown that novel conical microstructures are formed on the surface of silicon when it is irradiated with 100-fs laser pulses in the presence of halogen-containing gases (see Fig. 1). Structures are also formed using other background gases, such as N2 or air, but they tend to be more blunt and irregular in shape.1,2
© 2001 Optical Society of America
PDF ArticleMore Like This
Tsing-Hua Her, Richard J. Finlay, Claudia Wu, Eric Mazur, and Shrenik Deliwala
CFD6 Conference on Lasers and Electro-Optics (CLEO:S&I) 1998
J.E. Carey, L. Zhao, C. Wu, and E. Mazur
CFC2 Conference on Lasers and Electro-Optics (CLEO:S&I) 2001
Tomoyuki Shimoda, Kosuke Takahashi, and Minoru Obara
MB1_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2001