Ultraviolet Laser Repair of Advanced Semiconductor Memory Devices

Brian W. Baird; Brady E. Nilsen; Robert F. Hainsey; Ho Wai Lo

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2001),
paper CTuT2

Ultraviolet Laser Repair of Advanced Semiconductor Memory Devices

Brian W. Baird, Brady E. Nilsen, Robert F. Hainsey, and Ho Wai Lo

Conference on Lasers and Electro-Optics 2001

Baltimore, Maryland United States
6–10 May 2001
ISBN: 1-55752-662-1

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Laser Processing (CTuT)

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B. W. Baird, B. E. Nilsen, R. F. Hainsey, and H. W. Lo, "Ultraviolet Laser Repair of Advanced Semiconductor Memory Devices," in Conference on Lasers and Electro-Optics, J. Kafka, K. Vahala, R. Williamson, and A. Willner, eds., OSA Technical Digest (Optica Publishing Group, 2001), paper CTuT2.

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Abstract

Fabrication of semiconductor memory devices, including dynamic random access memory (DRAM) and static random access memory (SRAM), relies upon laser repair.

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