Abstract
In early 2000, we demonstrated the capability of femtosecond la er with a UV wavelength of 387 nm to drill 200-250 nm holes in Si-on-SiO2 substrate.1 It met the spacing requirement for I D waveguide photonic crystal.2 We then took the next step to study drilling small holes on actual waveguides (fabricated by FE TA lab with e-beam lithography; Si waveguide width: 500-700 nm; waveguide material: Si-on-SiO2, 200 nm thick single crystal Si on 1000 nm thick SiO2). Promising drilling results on waveguides were achieved, and a forbidden transmission zone or photonic band gap was discovered from the laser-machined waveguides during our preliminary measurement.
© 2002 Optical Society of America
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