High Speed, Compact, Adaptive Optics Using MEMS Silicon Deformable Mirrors

Clara Dimas; Paul Bierden; Thomas Bifano; Julie Perrault

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2002),
paper CMN3

High Speed, Compact, Adaptive Optics Using MEMS Silicon Deformable Mirrors

Clara Dimas, Paul Bierden, Thomas Bifano, and Julie Perrault

Conference on Lasers and Electro-Optics 2002

Long Beach, California United States
19–22 May 2002
ISBN: 1-55752-706-7

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Adaptive Optics and Control (CMN)

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C. Dimas, P. Bierden, T. Bifano, and J. Perrault, "High Speed, Compact, Adaptive Optics Using MEMS Silicon Deformable Mirrors," in Conference on Lasers and Electro-Optics, M. Fejer, F. Leonberger, J. Fujimoto, and S. Newton, eds., OSA Technical Digest (Optica Publishing Group, 2002), paper CMN3.

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Abstract

In the work described here, a MEMS DM having good optical quality was used for compensation of static aberrations in an optical system. The MEMS DM, manufactured by Boston Micromachines Corporation, is a 140 actuator, continuous silicon mirror. Its optoelectromechanical performance characteristics, which have been detailed elsewhere.^1–3

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