Abstract
High-order harmonic generation has been widely investigated as a promising coherent light source in the extreme ultraviolet (XUV) and soft X-ray region for many applications in physics, chemistry, and biology. If the XUV region around 50 nm is considered, a KrF excimer laser has an advantage as a drive laser over longer wavelength lasers, because the harmonic order is still in the perturbative regime, and a higher conversion efficiency of ~10−5 is expected. In this report, we have generated 50-nm microjoule pulses by the 5th harmonic of a KrF laser.
© 2002 Optical Society of America
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