Abstract
There has been a considerable demand on the development of a practical laser in the vacuum ultraviolet (VUV) spectral region. Rare gas ex- cimers are known to be one of the very few molecules that radiate in the spectral region. We have studied the electron beam excitation method to achieve the high power laser radiation in the VUV using these molecules. In addition to this excitation method, compact discharge technique has been complementarily developed to realize practical VUV lasers. Such VUV lasers would open up various application fields, such as deep UV optical lithography and advanced materials processing.
© 2002 Optical Society of America
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