Abstract
Spectroscopic ellipsometry (SE) routinely measures both amplitude and phase of solid surface reflectance, thus characterizing the complex linear dielectric function ε(ω) completely. Second- harmonic (SH) spectroscopy, on the other hand, usually measures only amplitude, because the conventional approach to measuring phase of SH reflectance is prohibitively time-consuming for many applications.1 In the example of this approach illustrated in Figure la, the SH signal, generated by a narrow-band 100 fs laser, interferes at each ω with a reference SH signal generated in a spectrally flat nonlinear material placed before the sample. The natural dispersion of air creates phase difference which is measured by scanning reference-sample distance. Through multiple scans at different ω, such as the 16 shown in Figure la, a phase spectrum Δφ(ω) is slowly assembled. We recently demonstrated a potentially powerful alternative method—Frequency-Domain Interferometric
© 2002 Optical Society of America
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