Abstract

Optical interconnections on Si CMOS integrated circuits (Ics) offer high packing density, wide bandwidth, low power dissipation, and low latency interconnections^1,2 which are particularly interesting for System on a Chip (SOC) implementations. These SOC systems focus upon the integration of multiple types of signals, such as optical, analog, and digital, into a miniaturized single chip implementation. Interconnections are a key aspect of SOC designs. To realize optical waveguide interconnections on Si CMOS circuits, the integration of optical waveguides which are compatible with the thermal profiles which can be tolerated by Si CMOS circuits is a key fabrication issue.^3,4 In this summary, we report demonstrations of optical interconnections on foundry Si CMOS circuits using polymer optical waveguides.

© 2002 Optical Society of America