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Conferences > CLEO > 2002 > CTuK > CTuK37
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2002),
  • paper CTuK37

Femtosecond Micromachining of InP: Analysis of Ablation Rates, Morphology and Residual Strain

A. Borowiec and H. K. Haugen

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Abstract

Laser-based processing with femtosecond light pulses has attracted considerable attention due to the qualitatively different light-matter interactions.1 In this work we present results of micromachining on InP with 120 fs, 800 nm laser pulses. The geometry and morphology of the cuts was analyzed by scanning electron microscopy (SEM) and strain measurements were performed with a degree of polarization technique (DOP).2

© 2002 Optical Society of America

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