Abstract

Free-space fiber optical interconnection has advantages over other types of connection: low loss, light weight, electromagnetic immunity, low power consumption and large data transmission capacity. Currently, by using Micromaching technique, the size of this optical communication device has been further reduced to microscopic range and also to realize intra-chip optical communication. It also overcomes drawbacks of conventional switches, including low speed, large size and high cost. The surface-Micromaching offers greater flexibility and shorter development cycles and also is particularly suitable for implementation of free-space integrated optics. Recently, there has been a growing interest in applying the MEMS technology to improve the performance and reduce the cost of optical-mechanical switches.^1,2 Bulk-Micromaching of silicon has been combined with external actuators to implement the 4 × 4 switch.^2,1

© 2002 Optical Society of America