Optical MEMS Fabrication, scaling and design of microoptical devices and systems

Olav Solgaard

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Technical Digest (Optica Publishing Group, 2003),
paper CThA4

Optical MEMS Fabrication, scaling and design of microoptical devices and systems

Olav Solgaard

Conference on Lasers and Electro-Optics 2003

Baltimore, Maryland United States
1–6 June 2003
ISBN: 1-55752-733-4

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Opticals MEMS (CThA)

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O. Solgaard, "Optical MEMS Fabrication, scaling and design of microoptical devices and systems," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optica Publishing Group, 2003), paper CThA4.

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Abstract

MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.

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