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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CThY2

Nanoscale and femtogram trace element analysis using soft laser ablation fluorescence spectroscopy

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Abstract

A solid-state surface analysis of trace element was demonstrated with nanometer depth resolution and femtogram detection sensitivity. An LIF spectroscopy was combined with an excimer laser ablation, and the depth resolution of 3.6nm was obtained.

© 2003 Optical Society of America

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