MOCVD Grown Solar-Blind Photodetector Arrays

Uttiya Chowdhury; Charles J. Collins; Michael M. Wong; Ting Gang Zhu; Jonathan C. Denyszyn; Jin-Ho Choi; Joe C. Campbell; Allen Hairston; Phil Lamarre; Kwok K. Wong; Chris Cooke; John Mullarkey; Marion Reine; Russell D. Dupuis

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Technical Digest (Optica Publishing Group, 2003),
paper CTuF6

MOCVD Grown Solar-Blind Photodetector Arrays

Uttiya Chowdhury, Charles J. Collins, Michael M. Wong, Ting Gang Zhu, Jonathan C. Denyszyn, Jin-Ho Choi, Joe C. Campbell, Allen Hairston, Phil Lamarre, Kwok K. Wong, Chris Cooke, John Mullarkey, Marion Reine, and Russell D. Dupuis

Conference on Lasers and Electro-Optics 2003

Baltimore, Maryland United States
1–6 June 2003
ISBN: 1-55752-733-4

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UV Materials and Methods (CTuF)

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U. Chowdhury, C. J. Collins, M. M. Wong, T. G. Zhu, J. C. Denyszyn, J. Choi, J. C. Campbell, A. Hairston, P. Lamarre, K. K. Wong, C. Cooke, J. Mullarkey, M. Reine, and R. D. Dupuis, "MOCVD Grown Solar-Blind Photodetector Arrays," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference, Technical Digest (Optica Publishing Group, 2003), paper CTuF6.

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Abstract

We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256×256 photodetector arrays exhibited a high operability of >99%.

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