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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CWA45

Self-assembled out-of-plane movable vane for variable optical attenuator application

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A self-assembled pop-up movable polysilicon vane is developed for enabling a new MEMS VOA. The results show 70dB attenuation range and less than 0.8 dB insertion loss.

© 2003 Optical Society of America

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