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Conferences > CLEO > 2004 > CTuX > CTuX6
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CTuX6

Interferometric characterization of transmission diffraction gratings with non-flat substrate surfaces

M. Sumetsky, T. White, H. M. Dyson, P. S. Westbrook, and B. J. Eggleton

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Abstract

We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings enabling simultaneous measurement of the local chirp and substrate thickness variation.

© 2004 Optical Society of America

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