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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper CMN3

Extremely thin, single-crystal films of LiNbO3 fabricated using localized He+ion-implantation

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Abstract

We demonstrate that extremely thin, i.e., ~2-3µm, single-crystal films of LiNbO3 can be formed on a wafer using patterned ion-implantation followed by chemical etching. Control of the membrane thickness and its waveguiding properties are demonstrated.

© 2005 Optical Society of America

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