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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper JThG4

Nano-scale imaging with a compact EUV laser

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Abstract

We report sub-140 nm resolution imaging with 46.9 nm radiation from a compact capillary-discharge laser. This result was obtained using a combination of a Sc/Si multilayer- coated Schwarzschild condenser and free-standing imaging zone plate.

© 2005 Optical Society of America

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