Abstract
We report sub-140 nm resolution imaging with 46.9 nm radiation from a compact capillary-discharge laser. This result was obtained using a combination of a Sc/Si multilayer- coated Schwarzschild condenser and free-standing imaging zone plate.
© 2005 Optical Society of America
PDF ArticleMore Like This
F. Brizuela, H. Bravo, G. Vaschenko, C. S. Menoni, J. J. Rocca, O. Hemberg, B. Frazer, S. Bloom, W. Chao, E. H. Anderson, and D. T. Attwood
JSuA21 Frontiers in Optics (FiO) 2006
Erik B. Malm, Przemyslaw W. Wachulak, Jorge J. Rocca, Carmen S. Menoni, and Mario C. Marconi
FWJ2 Frontiers in Optics (FiO) 2011
C.S. Menoni, F. Brizuela, C. Brewer, H. Bravo, B. Langdon, M. Berrill, D. Martz, G. Vaschenko, M.C. Marconi, J. J. Rocca, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, V. V. Kondratenko, O. Hemberg, B. Frazer, and S. Bloom
CThCC2 Conference on Lasers and Electro-Optics (CLEO:S&I) 2007