Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CMP4

F2 Laser Patterning Indium Tin Oxide (ITO) Thin Film Coating on Glass Substrates

Not Accessible

Your library or personal account may give you access


The first experimental results of machining indium tin oxide thin films with the 157nm F2 laser are reported. A low 0.27-J/cm2 ablation threshold and stoichiometric removal enable electrode patterning for biochip applications.

© 2006 Optical Society of America

PDF Article
More Like This
Non-thermal Selective Patterning of ITO Thin Film by 10 ps laser

Nazar Farid, Pinaki Dasgupta, Helios Chan, David Milne, and Gerard M O’Connor
CM_7_5 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2017

Pulsed Laser Sintering for Fabricating Indium Tin Oxide Thin Films

Taesoon Park and Dongsik Kim
26P_88 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2015

Heat accumulation effects in femtosecond laser ablation of ITO thin films for DEP trapping devices

M. Y. Xu, S. A. Hosseini, L. D. Lilge, and P. R. Herman
CFR3 Conference on Lasers and Electro-Optics (CLEO) 2007


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription

Select as filters

Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved