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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CMP4

F2 Laser Patterning Indium Tin Oxide (ITO) Thin Film Coating on Glass Substrates

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Abstract

The first experimental results of machining indium tin oxide thin films with the 157nm F2 laser are reported. A low 0.27-J/cm2 ablation threshold and stoichiometric removal enable electrode patterning for biochip applications.

© 2006 Optical Society of America

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