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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CMP2

High-Speed MEMS Micromirror Switching

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Abstract

We report a high-speed MEMS micromirror that switches in 225 ns using 22 V. Switch repetition rates of up to 100 kHz have been demonstrated. These performance characteristics significantly extend the application space of micromirrors.

© 2007 Optical Society of America

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