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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CThJ4

Single and Multi-Scan Femtosecond Laser Writing for Selective Chemical Etching of Glass Micro-Channels

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Abstract

High aspect-ratio micro-channels were fabricated in fused silica using a highrepetition-rate 522-nm femtosecond laser and selective chemical etching with diluted hydrofluoric acid. Single and multi-scanning writing is compared for controlling cross-sectional profile and wall roughness.

© 2007 Optical Society of America

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