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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CThP3

Tunable Fabry-Perot Waveguide Microcavities with High Index Contrast Mirrors

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Abstract

Tunable micromachined SOI Fabry-Perot waveguide cavities with high-index-contrast silicon/air Bragg mirrors are demonstrated. The devices can be tuned thermo-optically or using integrated micro-electro-mechanical systems. Device fabrication, experimental data, and simulation results will be presented.

© 2007 Optical Society of America

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