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Conferences > CLEO > 2007 > CTuZ > CTuZ3
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CTuZ3

CMOS-Compatible High Frequency Infrared Photodiodes

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, S. Deneault, F. Gan, F. X. Kartner, and T. M. Lyszczarz

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Abstract

CMOS-compatible, silicon waveguide photodiodes, responding to radiation from 1270 to 1740 nm (0.8 A W-1 at 1550 nm) with a 3 dB bandwidth of 10 to 20 GHz were formed by Si ion implantation.

© 2007 Optical Society of America

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