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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CMCC5

70 nm Lensless Diffractive Microscopy using Tabletop Soft X-ray Sources

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Abstract

We use curvature correction and high-numerical-aperture imaging to demonstrate a soft-x-ray diffraction microscope with 70-90 nm resolution using two tabletop coherent sources. This near-diffraction-limited resolution of 1.5λ is a first for x-ray diffractive imaging.

© 2008 Optical Society of America

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