Abstract
Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 µm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ~ 3×105.
© 2008 Optical Society of America
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