1.5-μm-radius high-Q silicon microring resonators

Qianfan Xu; David Fattal; Raymond G. Beausoleil

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper CTuDD1

1.5-μm-radius high-Q silicon microring resonators

Qianfan Xu, David Fattal, and Raymond G. Beausoleil

Conference on Lasers and Electro-Optics 2008

San Jose, California United States
4–9 May 2008
ISBN: 978-1-55752-859-9

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Resonators and Dispersion Engineering (CTuDD)

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Q. Xu, D. Fattal, and R. G. Beausoleil, "1.5-μm-radius high-Q silicon microring resonators," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper CTuDD1.

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Abstract

We show cascaded silicon microring resonators with 1.5-μm radius critically coupled to a narrower waveguide. A coupled Q of 9,000 is achieved. Devices are fabricated with the widely-available SEM-based lithography system using a stitching-free design.

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