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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CTuR3

Optical Beam Shaping by Spatial Light Phase Modulator with Bidirectional Tilt-Piston Micromirror Array

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Abstract

We have succeeded in controlling the optical beam profile by MEMS spatial light phase modulator experimentally. The modulator proposed by our group has 1-D array of bidirectional tilt-piston micromirrors driven by electrostatic force.

© 2008 Optical Society of America

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