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Conferences > CLEO > 2009 > CThU > CThU6
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CThU6
  • •https://doi.org/10.1364/CLEO.2009.CThU6

Low Loss Etchless Silicon Photonic Waveguides

Jaime Cardenas, Carl B. Poitras, Jacob T. Robinson, Kyle Preston, Long Chen, and Michal Lipson

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Abstract

We demonstrate low loss silicon waveguides fabricated without silicon etching by selective oxidation. We show propagation losses of 0.3dB/cm (λ=1.55μm), roughness of 0.3nm RMS, and 0.0002dB loss for a 90° bend with 20μm bending radius.

© 2009 Optical Society of America

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