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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuAA5
  • https://doi.org/10.1364/CLEO.2009.CTuAA5

Imaging Interferometric Nanoscopy to the Limit of Available Frequency Space

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Abstract

Imaging interferometric microscopy resolution to λ/2(nsub+1) (nsub = substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (λ/4.2) is achieved using a 633 nm source and a 0.4 NA lens.

© 2009 Optical Society of America

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