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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuE1
  • https://doi.org/10.1364/CLEO.2009.CTuE1

High Resolution Imaging of Optical Modes in Silicon Microdisk Cavities based on Near-field Perturbation

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Abstract

We demonstrate high resolution near-field imaging of the optical modes profile in high Q silicon microdisks. A spatial resolution of ~20nm is obtained by characterizing the perturbative effects of a scanning AFM tip on the microdisk transmission.

© 2009 Optical Society of America

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