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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuS4
  • https://doi.org/10.1364/CLEO.2009.CTuS4

In-Situ Calibration of a Translation Stage by Low-Coherence Tandem Interferometer

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Abstract

For remote and in-situ calibration of translation stage, system comparing optical-path-differences of two distantly-located low-coherence-interferometers through a single-mode-optical-fiber has been developed. Results of 52 nm-deviation and 30 nm-standard deviation for 39 mm-displacement is achieved.

© 2009 Optical Society of America

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