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Proposal of Fabricating a Woodpile Photonic Crystal Nanocavity by a Two-directional Etching without Wafer Bonding

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Abstract

Ultra-high-Q modes are designed in woodpile photonic crystal by modulating the unit cell size along a waveguide in complete photonic band gap. We propose to fabricate the nanocavities with a two-directional etching without wafer bonding.

© 2009 Optical Society of America

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