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Conferences > CLEO > 2009 > JThE > JThE38
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JThE38
  • •https://doi.org/10.1364/CLEO.2009.JThE38

Single-Shot Focal Spot Image of EUV Laser Using a ZnO Scintillator

Tomoharu Nakazato, Toshihiko Shimizu, Kouhei Yamanoi, Satoru Takatori, Elmer Estacio, Marilou Cadatal, Nobuhiko Sarukura, Hiroaki Nishimura, Kunioki Mima, Momoko Tanaka, Masaharu Nishikino, Yoshihiro Ochi, Toshiyuki Ohba, Takeshi Kaihori, Tetsuya Kawachi, Yuji Kagamitani, Dirk Ehrentraut, and Tsuguo Fukuda

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Abstract

This work demonstrates a novel way to image the beam profile of an EUV laser in a single shot by employing the scintillator properties of ZnO crystal. These results are important for EUV lithography applications.

© 2009 Optical Society of America

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