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Conferences > CLEO > 2010 > CMI > CMI7

Fabrication of High Q Microdisk Resonators using Thermal Nanoimprint Lithography

P. Schiavone, N. Chaix, Q. Li, A. Eftekhar, S. Yegnanarayanan, and A. Adibi

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Abstract

We demonstrate the fabrication of high Q microdisk resonators on an SOI platform using thermal nanoimprint lithography. The achieved Q factor is 60000 for 2µm radius disks. Arrays of 32 resonators show uniform spectral response.

© 2010 Optical Society of America

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