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Proton-Implanted 850-nm Photonic Crystal Vertical-Cavity Surface-Emitting Lasers with Improved Performance

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Abstract

Proton-implanted 850-nm photonic crystal vertical-cavity surface-emitting lasers are fabricated and characterized. Strong and more stable index guiding is introduced, resulting in planar lasers with generally decreased threshold current and increased slope efficiency.

© 2010 Optical Society of America

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