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Characterization of Bragg Gratings in Al2O3 Waveguides Fabricated by Focused Ion Beam Milling and Laser Interference Lithography

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Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.

© 2010 Optical Society of America

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