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Wafer-Scale Monolithic Integration of Al2O3:Er3+ Amplifiers with Si Waveguides

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Abstract

Co-sputtering and structuring active erbium-doped aluminum oxide waveguides directly on top of processed SOI passive waveguides provides coupling losses of 2.5 dB between active and passive waveguides and a signal enhancement of 7.2 dB.

© 2010 Optical Society of America

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